Cleanroom is a controlled enviroment for manufacturing or sceintific research which need lower pollutant area. According to ISO 14644-1, each level for particle quantity as below matrix.
Classification for ISO 14644-1 & Fed-Std 209E
Maximum concentration limits, particles/m³ of air
| ISO-14644-1 | Fed-Std209E | ≧0.1 µm | ≧0.2 µm | ≧0.3 µm | ≧0.5 µm | ≧1 µm | ≧5 µm |
| ISO 1 | 10 | 2 | |||||
| ISO 2 | 100 | 24 | 10 | 4 | |||
| ISO 3 | Class 1 | 1,000 | 237 | 102 | 35 | 8 | |
| ISO 4 | Class 10 | 10,000 | 2,370 | 1,020 | 352 | 83 | |
| ISO 5 | Class 100 |
100,000 |
23,700 | 10,200 | 3,520 | 832 |
29 |
| ISO 6 | Class 1,000 |
1,000,000 |
237,000 | 102,000 | 35,200 | 8,320 |
293 |
| ISO 7 | Class 10,000 |
|
352,000 | 83,200 |
2,930 |
||
| ISO 8 | Class 100,000 |
|
3,520,000 | 832,000 |
29,300 |
||
| ISO 9 | Class 1,000,000 |
|
35,200,000 | 8,320,000 |
293,000 |